by AXUS
AXUS
Axus Technology provides advanced CMP tools and technology, along with exceptional technical expertise for polishing, wafer cleaning, precision wafer grind processing, and legacy tools; making Axus Technology one of the best highly specialized technology suppliers and consulting services focused on engineering capability and efficiency in supporting the CMP market.
by AXUS
CMP, Wet Processing
Aquarius™ A200-sa Wafer Cleaner
Post-CMP scrubber with the possibility of simultaneous scrubbing of two wafer sizes (up to 200 mm),...
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by AXUS
CMP
Gemini-3 Dual Slurry / Cleaning Chemistry Delivery...
Dual slurry/cleaning chemistry delivery system.
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by AXUS
Grinding/Dicing
AXUS Grinding Foundry Service
Advanced Grinding process development up to standard production foundry.
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by AXUS
CMP
AXUS CMP Foundry Service
Advanced CMP process development up to standard production foundry.
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by AXUS
Grinding/Dicing
DISCO DFG8540 Grinder
Automatic Cassette to cassette high Throughput two-spindle, three-chuck table 200 mm Grinder.
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by AXUS
Grinding/Dicing
DISCO DFG 840/841 Grinder
Cassette to cassette two-spindle, three-chuck table Grinder, enables ultra-thin grinding.
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by AXUS
Grinding/Dicing
Strasbaugh 7AF Grinder
Automatic Cassette to cassette high Throughput two-spindle, 2 Grinding Chucks 200 mm Grinder.
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by AXUS
Grinding/Dicing
Strasbaugh 7AA Grinder
Manual loading automated in-feed Grinder with 2 spindles for up to 150 mm wafers.
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by AXUS
Grinding/Dicing
Disco DAG810 Grinder
Manual Loading Automatic grinder with high-rigidity, low-vibration spindle for superior grinding and low throughput.
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by AXUS
CMP, Wet Processing
OnTrak DSS-200 Synergy™ Post CMP Scrubber
Double-sided PVA scrubber for 100 mm to 200 mm wafers.
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by AXUS
CMP, Wet Processing
OnTrak DSS200 Series 2 Post CMP Scrubber
Double-sided PVA scrubber for 100 mm to 200 mm wafers.
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by AXUS
CMP, Wet Processing
OnTrak DSS-200 Series 1 Post CMP Scrubber
Double-sided PVA scrubber for 100 mm to 200 mm wafers.
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by AXUS
CMP Remanufactured
Strasbaugh 6EC CMP
Manual loading, one-spindle one carrier automated compact dry-in, wet-out (DIWO) CMP System.
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by AXUS
CMP Remanufactured
Surface Automated CMP System
Dry-in, wet-out (DIWO) automated 2-platen one-spindle CMP System.
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by AXUS
CMP
Crystal Carrier upgrade
Carrier upgrade with Axus advanced 4-zone membrane carrier for ultra-thin or fragile wafers.
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