by Phaos Tech
Image of PTZ B+ a microscope with real-time image observation and 360° rotation of Phaos Tech.

Optical Surface Inspection


PT Zoom Series


Automatic 3D 360° video stereoscopic microscope with real-time image observation.

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by ONTO INNOVATION (DACH, Benelux, North France)
Onto Innovation: Image of the Defect and Contamination Inspection System PrimaScan P for up to 600x600 mm panels.

Optical Surface Inspection


PrimaScan™ P Series


All-surface contamination and defectivity inspection and imaging for wafers, reticles, and panel level substrates, ≤ 600...

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by ONTO INNOVATION (DACH, Benelux, North France)
Image of the Surface & Sub-Surface Defect Inspection Celero PL for 100-300mm wafers from Onto Innovation.

Optical Surface Inspection


Celero™ PL System


Subsurface defect inspection and classification for silicon carbide (SiC) and gallium nitride (GaN) based wafers and...

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by Phaos Tech
OptoNano 200 advanced microscopy technology from PhaosTech

Optical Surface Inspection


OptoNano 200


Advanced microscopy technology, resolve down to 137 nm scale.

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by ONTO INNOVATION (DACH, Benelux, North France)
Image of the Defect and Contamination Inspection System PrimaScan from Onto Innovation with manual load from 100-450mm substrates.

Optical Surface Inspection


PrimaScan™ Series


All-surface contamination and defectivity inspection and imaging for wafers, reticles, and panel level substrates, 100–450 mm,...

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