For the Semiconductor / MEMS area

our advanced tools ensure accurate measurements, reliable inspections, and seamless automation, helping you optimize your production processes with ease. Explore our comprehensive offerings and elevate your manufacturing efficiency.

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Metrology

Optical Surface Inspection
Example image of the Fastmicro Sample Scanner by FAST MICRO validates surface cleanliness with 0.5 µm particle detection, objective reports and measurements in seconds, for the area: Optical Surface Inspection
Electron (SEM) & Optical Microscopy
Example image for Scanning Electron Microscope: CUBE 2, Tabletop SEM from EmCrafts as example image for Scanning Electron Microscope
Liquid Flow Measurement & Bubble Detection
Liquid Flow Measurement and Bubble Detection. Ultrasonic Clamp-On Flow Sensor SEMIFLOW co.65 260pi v2.0 from Sonotec
Chemical Concentration Meter
Example image for Chemical Concentration Meter. Rhosonics B30 Series with quaternary.
Wafer Dimensional Metrology
Example image for Wafer Dimensional Metrology. Nanomez WT3500 from Kovis, a hybrid metrology system.

Handling

Wafer Handling
Example image for Wafer Handling. STC Automatic Notch- /Flat-Aligner.
Automation
Example image for Automation: T Series Bridge Wafer Sorters, 150–300 mm with Optional Stocker and Inspection Modules from NADA Technologies LTT.
Others
Handling tools from CK Plas as example image for the area: Other Handling

new products here:

Zip Stocker
Zip Stocker
Zip Stocker
8 sites SMIF POD and Wafer Box AMR
8 sites SMIF POD and Wafer Box AMR
8 sites SMIF POD and Wafer Box AMR
4 sites Open Cassette AMR
4 sites Open Cassette AMR
4 sites Open Cassette AMR
Narrow type AMR
Narrow type AMR
Narrow type AMR
AMR for Metal Frame Cassette
AMR for Metal Frame Cassette
AMR for Metal Frame Cassette
4 sites FOUP AMR
4 sites FOUP AMR
4 sites FOUP AMR
RFID eRack
RFID eRack
RFID eRack