Aquarius™ A200-sa Wafer Cleaner

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By AXUS

Supplier Info

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Product Type:

Equipment

Application:

CMP, Wet Process

Product Description:

Aquarius™ Wafer Cleaner

The innovative Aquarius™ Wafer Cleaner from Axus Technology, brings enhancements to all aspects of 100mm, 150mm, and 200mm wafer cleaning, including defectivity and throughput. Aquarius™ boosts the efficiency of the wafer cleaning process by enabling the simultaneous processing of two different wafer sizes. With significant engineering strides that are shaping the future of wafer cleaning equipment, Axus Technology proudly introduces the top-tier wafer scrubber to the market.

Dimensions:

178 cm W x 142 cm D x 249 cm H

 

Standard Features include:

  • Four brush boxes with full recipe control of all critical process variables
  • Two spin-rinse-dry stations
  • Two wet cassette stations in and two dry stations out
  • High speed wafer handling robot with dual end effectors
  • All operations can be done manually from the graphical user interface
  • Three different modes of control for brush/wafer contact: position, brush torque, and contact force

 

Optional Features:

  • On-board dilution capabilities
  • Flat Finder/OCR
  • SMIF Version
  • Integrated Metrology

Theres currently no information available for application.

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