
CMP, Wet Processing
ZEUS Wafer Cleaning System
Semi-Automatic Single Wafer Cleaner that sequentially performs five cleaning processes and allows for full customization.
INFOSemi-Automatic Single Wafer Cleaner that sequentially performs five cleaning processes and allows for full customization.
INFOCassette-to-cassette stand-alone 8-12″ linear double-side PVA scrubber.
INFOCassette-to-cassette stand-alone 3–6″ linear double-side PVA scrubber.
INFOManual loading, automated post-CMP single-chamber scrubber for 4–12″ wafers.
INFOManual loading, automated post-CMP scrubber for 4–12″ wafers.
INFOIntelligent CMP equipment designed for high versatility for 12″ (300 mm) wafers.
INFOCMP equipment for hard and inert wafers, high down-force, up to 2 heads, and up to...
INFOManual loading, automated single-spindle, single-table 200 mm CMP equipment.
INFOManual loading, automated single-spindle, single-table 150 mm CMP equipment.
INFO