CMP, Wet Processing
ZEUS Wafer Cleaning System
Semi-Automatic Single Wafer Cleaner that sequentially performs five cleaning processes and allows for full customization.
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Semi-Automatic Single Wafer Cleaner that sequentially performs five cleaning processes and allows for full customization.
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Cassette-to-cassette stand-alone 8-12″ linear double-side PVA scrubber.
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Cassette-to-cassette stand-alone 3–6″ linear double-side PVA scrubber.
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Manual loading, automated post-CMP single-chamber scrubber for 4–12″ wafers.
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Manual loading, automated post-CMP scrubber for 4–12″ wafers.
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Intelligent CMP equipment designed for high versatility for 12″ (300 mm) wafers.
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CMP equipment for hard and inert wafers, high down-force, up to 2 heads, and up to...
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Manual loading, automated single-spindle, single-table 200 mm CMP equipment.
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Manual loading, automated single-spindle, single-table 150 mm CMP equipment.
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