4 sites Open Cassette AMR

Product Type:

Metrology & Handling

Application:

Automation

Product Description:

Autonomous Mobile Robot for 4 sites Open Cassette

The Open Cassette AMR is an intelligent solution for highly precise and automated material logistics in semiconductor manufacturing. Designed for maximum efficiency and process reliability, this autonomous mobile robot combines advanced navigation technology with the careful handling of sensitive wafers in open cassette formats.

With a capacity of up to 4 open cassettes, the system is ideally suited for wafer manufacturers, foundries, as well as wafer bumping and wafer probing applications. It ensures a stable and continuous material flow between process steps, contributing to higher throughput and optimized equipment utilization.

A key highlight is its seamless navigation and safety system: advanced sensor technology eliminates blind spots in positioning and obstacle detection. This is complemented by a secondary positioning system with omnidirectional wheels and visual fine alignment, enabling precise maneuvering and positioning even in complex production layouts.

For maximum handling accuracy, the system features an integrated robotic arm with 2.5D vision, allowing exact coordinate calibration across 6 degrees of freedom. This ensures reliable and repeatable execution of even complex pick-and-place operations.

The integrated 6-axis collaborative robot, certified according to ISO 10218-1 and ISO 15066, guarantees the highest safety standards in human-machine interaction, making it ideal for flexible and scalable production environments.

Capacity: 4 open cassettes
Applications: Wafer Manufacturer, Foundry, Wafer Bumping, Wafer Probing

Features:

• No blind spots in navigation positioning / safety detection
• Secondary body positioning – Omnidirectional wheels / visual precise alignment
• Robotic arm 2.5D vision – 6 degrees of freedom coordinate calibration
• 6-axis Collaborative Robot with ISO 10218-1 and 15066 Certification
• SEMI-S2, -S8, -S10, -S13, -S14, -S17 and -S22 Certification
• Support LF RFID / UHF RFID / BARCODE READER
• Support E84 SEMI standard
• Support SEMI SECS/GEM (GEM300 REPORT)