AMR for Metal Frame Cassette

Product Type:

Metrology & Handling

Application:

Automation

Product Description:

The AMR for Metal Frame Cassette is an intelligent solution for highly precise, automated material logistics in semiconductor back-end manufacturing. Designed for maximum efficiency and process reliability, this autonomous mobile robot combines state-of-the-art navigation technology with the precise handling of sensitive components.

With a capacity of up to 4 metal frame cassettes, the AMR is ideally suited for demanding production environments. It supports a wide range of critical processes, including wafer mounting, laser grooving, die sawing, UV curing, and die pick & place, ensuring a seamless material flow between individual process steps.

A key highlight is its seamless navigation and safety system: advanced sensor technology eliminates blind spots in positioning and obstacle detection. This is complemented by a secondary positioning system with omnidirectional wheels and visual fine alignment, enabling maximum accuracy even in confined spaces.

For highest handling precision, the system features an integrated robotic arm with 2.5D vision, allowing exact coordinate calibration across 6 degrees of freedom. Even complex pick-and-place tasks are executed reliably and with high repeatability.

The integrated 6-axis collaborative robot, certified according to ISO 10218-1 and ISO 15066, ensures maximum safety in human-machine interaction—making it ideal for modern, flexible production environments.

Capacity: 4
Applications: Wafer Mount, Laser Groove, Die Saw, UV Cure, Die PnP

Features:

• No blind spots in navigation positioning / safety detection
• Secondary body positioning – Omnidirectional wheels/visual precise alignment
• Robotic arm 2.5D vision – 6 degrees of freedom coordinate calibration
• 6-axis Collaborative Robot with ISO 10218-1 & 15066 Certification
• SEMI-S2, -S8, -S10, -S13, -S14, -S17 & -S22 Certification
• Support LF RFID / UHF RFID / BARCODE READER
• Support E84 SEMI standard
• Support SEMI SECS/GEM (GEM300 REPORT)

This AMR provides a future-ready solution for efficient automation, precise handling, and reliable integration into modern semiconductor manufacturing lines.