8 sites SMIF POD and Wafer Box AMR

Product Type:

Metrology & Handling

Application:

Automation

Product Description:

The AMR for SMIF pod and wafer box is a powerful solution for precise and automated material logistics in semiconductor manufacturing. Designed for high efficiency and process reliability, this autonomous mobile robot combines advanced navigation technology with the safe handling of sensitive carriers.

With a capacity of up to 8 pods or boxes, the AMR is ideally suited for wafer manufacturers, foundries, as well as wafer bumping and wafer probing applications. It ensures a stable and continuous material flow, helping to increase throughput and maximize equipment utilization.

A key feature is its seamless navigation and safety system with no blind spots in positioning or obstacle detection. This is enhanced by a secondary positioning system with omnidirectional wheels and visual precision alignment, enabling accurate movement even in complex layouts.

For precise handling, the system is equipped with a robotic arm featuring 2.5D vision, allowing exact coordinate calibration across 6 degrees of freedom. The integrated 6-axis collaborative robot, certified according to ISO 10218-1 and ISO 15066, ensures maximum operational safety.

In addition, the system complies with key industry standards, including SEMI S2, S8, S10, S13, S14, S17, and S22 certifications, and supports LF RFID, UHF RFID, barcode readers, the E84 SEMI standard, and SEMI SECS/GEM (GEM300 reporting) for seamless integration into fully automated semiconductor fabs.

Capacity: 8 pods/boxes
Applications: Wafer Manufacturer, Foundry, Wafer Bumping, Wafer Probing

Features:

• No blind spots in navigation positioning / safety detection
• Secondary body positioning – Omnidirectional wheels/visual precise alignment
• Robotic arm 2.5D vision – 6 degrees of freedom coordinate calibration
• 6-axis Collaborative Robot with ISO 10218-1 & 15066 Certification
• SEMI-S2, -S8, -S10, -S13, -S14, -S17 & -S22 Certification
• Support LF RFID / UHF RFID / BARCODE READER
• Support E84 SEMI standard
• Support SEMI SECS/GEM (GEM300 REPORT)