By MEI / RENA
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Revolution Immersion Wet Bench
MEI’s Revolution is an automated, multi-step, Rotary wet bench system. With IDX Flexware Control, an integrated…
Product Type:
Equipment
Application:
Wet Process
Product Description:
The MEI Evolution is a Full-Auto Wet Bench is an in-line, configurable, automated, modular, linear batch immersion wet process systems made for high throughput at a low cost.
Evolution Automated Wet Processing System Options:
- 150mm, 200mm wafers
- SMIF and “open cassette” input options
- Class 1 Environment
- Ballroom and Bulkhead mounting
- Heater, chiller, dryer options
- Spiking, reclaim, lid, overflow weir, re-circulation,
- Filter, fill method, agitation, flush and drain options
- Megasonic or ultrasonic baths
- Chemical spiking, re-circulation and filtration
- Heater (including solid state), chiller and dryer options
- Wafer carrier and queue pass-on cassette options
- HEPA filters to create a positive pressure environment
- SECS/GEM Interface Options
- Automatic bulk chemical system integration
- Integrated chemical spiking
- Automatic or manual doors
- Choice of materials, FM4910 (Halar, CPVC, PVDF) or polypropylene or stainless steel
- SEMI S2-0703 3rd party evaluation audits and FM certified systems
- UL Listed 508A Panel Shop
They are designed for dry in and dry out multiple lot batch wafer processing for wafer sizes 100mm to 300mm, within a Class 1 Environment. Running under IDX Flexware control, the Evolution is SECS/GEM compliant.Semiconductor, GaAs, solar cell, IC, Medical and MEMS