Evolution Immersion Wet Bench

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By MEI

Supplier Info

Product Type:

Equipment


Application:

Wet Process


Product Description:

The MEI Evolution is a Full-Auto Wet Bench is an in-line, configurable, automated, modular, linear batch immersion wet process systems made for high throughput at a low cost.


Evolution Automated Wet Processing System Options:

  • 150mm, 200mm wafers
  • SMIF and “open cassette” input options
  • Class 1 Environment
  • Ballroom and Bulkhead mounting
  • Heater, chiller, dryer options
  • Spiking, reclaim, lid, overflow weir, re-circulation,
  • Filter, fill method, agitation, flush and drain options
  • Megasonic or ultrasonic baths
  • Chemical spiking, re-circulation and filtration
  • Heater (including solid state), chiller and dryer options
  • Wafer carrier and queue pass-on cassette options
  • HEPA filters to create a positive pressure environment
  • SECS/GEM Interface Options
  • Automatic bulk chemical system integration
  • Integrated chemical spiking
  • Automatic or manual doors
  • Choice of materials, FM4910 (Halar, CPVC, PVDF) or polypropylene or stainless steel
  • SEMI S2-0703 3rd party evaluation audits and FM certified systems
  • UL Listed 508A Panel Shop

file_downloadEvolution-2015.pdf
file_downloadIDX-2015.pdf

They are designed for dry in and dry out multiple lot batch wafer processing for wafer sizes 100mm to 300mm, within a Class 1 Environment. Running under IDX Flexware control, the Evolution is SECS/GEM compliant.Semiconductor, GaAs, solar cell, IC, Medical and MEMS


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