Product Type:
Equipment
Application:
Wet Processing
Product Description:
The MEI Evolution is a Full-Auto Wet Bench is an in-line, configurable, automated, modular, linear batch immersion wet process system made for high throughput at a low cost.
Evolution Automated Wet Processing System Options:
- 150 mm, 200 mm wafers
- SMIF and “open cassette” input options
- Class 1 Environment
- Ballroom and Bulkhead mounting
- Heater, chiller, and dryer options
- Spiking, reclaim, lid, overflow weir, re-circulation,
- Filter, fill method, agitation, flush, and drain options
- Megasonic or ultrasonic baths
- Chemical spiking, re-circulation, and filtration
- Heater (including solid-state), chiller, and dryer options
- Wafer carrier and queue pass-on cassette options
- HEPA filters to create a positive pressure environment
- SECS/GEM Interface Options
- Automatic bulk chemical system integration
- Integrated chemical spiking
- Automatic or manual doors
- Choice of materials, FM4910 (Halar, CPVC, PVDF), polypropylene, or stainless steel
- SEMI S2-0703 3rd party evaluation audits and FM-certified systems
- UL Listed 508A Panel Shop
They are designed for dry-in and dry-out multiple lot batch wafer processing for wafer sizes 100 mm to 300 mm, within a Class 1 Environment. Running under IDX Flexware control, the Evolution is SECS/GEM compliant. Semiconductor, GaAs, solar cell, IC, Medical and MEMS