The Lumina AT1-AUTO integrates the Lumina AT1 with a single arm robot/automated cassette handler for 150 and 200 mm circular wafers
Lumina_AT1-Wafer-Loader
Onto Innovation (DACH, Benelux, North France) » Lumina_AT1-Wafer-Loader
Posted on June 9, 2022 by Stefanie Munding -
The Lumina AT1-AUTO integrates the Lumina AT1 with a single arm robot/automated cassette handler for 150 and 200 mm circular wafers