CMP Retaining Ring

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By WILLBE S&T

Supplier Info

Product Type:

Parts & Consumables


Application:

CMP Consumables


Product Description:

Willbe S&T manufacture to the highest Industry standards Retraining Rings for all CMP Equipment: AMAT, EBARA, IPEC, STRABAUGH,…

Different Designs are possible either using Willbe S&T patented Inject Molding Design with PEEKS or PBN Materials):

For PEEK for example,

  • Preventing SUS and PEEK/PPS separation issues by utilizing a non-bonded structure design
  • Completely outer molded PEEK material reduces defect issues that are caused by solidifying slurry and improves lifetime.
  • Side hole design enables the removal of slurry between the Retainer Ring and Membrane by jetting water through the side hole, reducing defect counts.
  • Application : AMAT Reflexion & Reflexion LK
  • High quality
  • Competitively priced
  • Also possible for New innovative Materials like PBN

But also for standard 2 pieces bonded designs with PPS, PEEK, or other Materials for 150, 200, or 300 mm CMP Heads


Different PEEK Grades are used with High-performance thermoplastic material, unreinforced PolyEtherEtherKetone (PEEK), semi-crystalline, granules for injection
moulding and extrusion as well as PPS, PBN

 

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