By WILLBE S&T
Supplier Info
Product Type:
Parts & Consumables
Application:
CMP Consumables
Product Description:
CMP Retaining rings from Willbe S&T, manufactured to the highest industry standards for all CMP equipment: AMAT, EBARA, IPEC, STRABAUGH,…
Different Designs are possible either using Willbe S&T patented Inject Molding Design with PEEKS or PBN Materials):
For PEEK for example,
- Preventing SUS and PEEK/PPS separation issues by utilizing a non-bonded structure design
- Completely outer molded PEEK material reduces defect issues that are caused by solidifying slurry and improves lifetime.
- Side hole design enables the removal of slurry between the Retainer Ring and Membrane by jetting water through the side hole, reducing defect counts.
- Application : AMAT Reflexion & Reflexion LK
- High quality
- Competitively priced
- Also possible for New innovative Materials like PBN
But also for standard 2 pieces bonded designs with PPS, PEEK, or other Materials for 150, 200, or 300 mm CMP Heads
Different PEEK Grades are used with High-performance thermoplastic material, unreinforced PolyEtherEtherKetone (PEEK), semi-crystalline, granules for injection moulding and extrusion as well as PPS, PBN
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