CMP Retaining Ring

Product Enquiry

Product Enquiry Form

By WILLBES&T

Supplier Info

Product Type:

Parts & Consumables


Application:

CMP Consumables


Product Description:

Willbesnt manufacture to highest Industriy standarts Retraining Rings for all CMP Equipment: AMAT, EBARA, IPEC, STRABAUGH,…

Different Designs are possible either using Willbesnt patented Inject Molding Design with PEEKS or PBN Materials):

For PEEK for example,

  • Preventing SUS and PEEK/PPS seperation issues by ultising a non-bonded structure design
  • Completely outer molded PEEK material reduces defect issue that is caused by solidifying slurry, and improves lifetime.
  • Side hole design enables the removal of slurry between Retainer Ring and Membrane by jetting water through the side hole, reducing defect counts.
  • Application : AMAT Reflexion & Reflexion LK
  • High quality
  • Competivetly priced
  • Also possiblke for New innovative Materials like PBN

But also for standart 2 pieces bonded designs with PPS, PEEK or other Materials for 150, 200mm or 300mm CMP Heads


Different PEEK Grades are used with High performance thermoplastic material, unreinforced PolyEtherEtherKetone (PEEK), semi crystalline, granules for injection
moulding and extrusion as well as PPS, PBN

 

There are currently no downloads available.

There are currently no videos available.

Theres currently no information available for application.


Product Enquiry Form