By WILLBE S&T
Supplier Info
Product Type: Parts & Consumables
Application: CMP Consumables
Will be S&T, a company with 35+ years of experience in the Semiconductor & FPD industry, manufactures the highest quality of CMP Retainer Rings: AMAT, EBARA, IPEC, STRASBAUGH,…
The company manufactures standard-type Retainer Rings (including bonded type) for 6″~12″ CMP Heads and has its patented design (PEEK & PBN Injection Molded (IR) SH & NH Type). Will be S&T can manufacture it at the customer’s request accordingly.
About Will be S&T patented design, Injection Molded (IR) Type:
- Improved lifetime and performance due to advanced material, PEEK.
- Prevent SUS and PEEK/PPS delamination, utilizing its non-bonded structure design.
- Reduced slurry residue as SUS is more vulnerable to abrasive slurry sticking than polymer.
- Side hole (SH) design enables deep cleaning of slurry residue inside the head assembly.
- Proven to reduce the number of particles, thus leading to reduced wafer defects.
- Applicable also using PBN.
- Application: AMAT Reflexion, LK, and LK Prime
- High quality
- Competitively priced
Various PEEK grades constitute high-performance thermoplastic materials, including unreinforced polyetheretherketone (PEEK) and semi-crystalline granules explicitly designed for injection molding and extrusion processes.
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