SEMIFLOW CLAMP-ON FLOW SENSOR

Product Enquiry

Product Enquiry Form

By SONOTEC

Supplier Info

Product Type:

Metrology & Handling


Application:

Cleaning Accessories, CMP, Equipment Cleaning, Mask Cleaning, Photolithography, Purity Chem Pump, Single Wafer Wet Etch & Clean Systems, Spin Coater, Spray Coating


Product Description:

CONTACTLESS FLOW SENSOR FOR HIGHLY PURE SEMICONDUCTOR APPLICATIONS

  • Highly precise flow and volume measurement
  • Innovative contact-free clamp-on architecture to eliminate risk of contamination and leakages
  • No system downtime in case of sensor exchange or retrofit
  • No external electronics to guarantee a compact design and simple handling
  • Permanent mount or quick relocation when needed
  • Special sensor package for the use in hazardous areas of Zone 1 according to ATEX/IECEx


SEMIFLOW CO.65 / SEMIFLOW CO.66 PI EX1 | CLAMP-ON FLOW SENSOR

Excellent Measurement Performance

  • Real-time instantaneous flow measurement and volume totalizing
  • Reliable flow measurement up to 400 L/min
  • Accuracy of +/- 2%

Technical Sensor Properties

  • Plastic housing (PVC-C) and plastic connector (PA)
  • Screwed lid and flexible inlay for optimal coupling between tube and transducer

Plug & Play Sensor- & Tubing Fit

  • Integrated electronics board and analysis unit
  • 8 different sensor sizes (¼”, 3/8″, ½”, (¾”), 1″, 1 ¼“, 40A, 50A OD) for a wide range of tube sizes
  • Ideally suited for PFA and other hard plastic tubes and pipes

Easy System Integration

  • Easy integration into existing PLC or pump systems via RS485 interface
  • Optional SONOFLOW® C³ | Software to provide user-friendly sensor operation and adjustment features

  • Single wafer cleaning equipment
  • Lithography equipment
  • Mixing equipment
  • Chemical supply system
  • Slurry lines


Product Enquiry Form