Ultrasonic Clamp-On Flow Sensor SEMIFLOW®

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By SONOTEC

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SONOFLOW IL.52 INLINE-SENSOR

SONOFLOW® IL.52 inline-sensors are designed for precise measurement of ultra-low flow rates - performing fast and…

Product Type:

Metrology & Handling

Application:

Contactless Liquid Flow Measurement

Product Description:

CONTACTLESS FLOW SENSOR FOR HIGHLY PURE SEMICONDUCTOR APPLICATIONS

  • Highly precise flow and volume measurement
  • Innovative contact-free clamp-on architecture to eliminate risk of contamination and leakages
  • No system downtime in case of sensor exchange or retrofit
  • No external electronics to guarantee a compact design and simple handling
  • Permanent mount or quick relocation when needed
  • Special sensor package for the use in hazardous areas of Zone 1 according to ATEX/IECEx

 

 

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SEMIFLOW® CO.65 | SEMIFLOW® CO.66 PI EX1 | CLAMP-ON FLOW SENSOR

Excellent Measurement Performance

  • Real-time instantaneous flow measurement and volume totalizing
  • Reliable flow measurement up to 400 L/min
  • Accuracy of +/- 2%

Technical Sensor Properties

  • Plastic housing (PVC-C) and plastic connector (PA)
  • Screwed lid and flexible inlay for optimal coupling between tube and transducer

Plug & Play Sensor- & Tubing Fit

  • Integrated electronics board and analysis unit
  • 8 different sensor sizes (¼”, 3/8″, ½”, (¾”), 1″”, 1.32“, 40A, 50A OD) for a wide range of tube sizes
  • Ideally suited for PFA and other hard plastic tubes and pipes

Easy System Integration

  • Easy integration into existing PLC or pump systems via RS-485 interface
  • Optional C³ Software to provide user-friendly sensor operation, configuration and calibration

  • Single wafer cleaning equipment
  • Lithography equipment
  • Mixing equipment
  • Chemical supply system
  • Slurry lines

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