ScrubPADS, to scrub chambers, Remove Residues from Vacuum Chambers

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By FOAMTEC

Supplier Info

Product Type:

Parts & Consumables


Application:

Cleaning Accessories


Product Description:

ScrubPADS, Quickly & Safely Remove Process Residues from Vacuum Chambers

  • ScrubPADS® are patented scrubbing tools for use in PM procedures on process equipment in semiconductor, flat panel display, optical component and hard disk drive industries. The availability of various sized diamond, silicon carbide and aluminum oxide abrasives allow for safe and efficient scrubbing of the most difficult to clean process chambers.
  • ScrubPADS®, used in conjunction with UltraSOLV® Sponges, Wipers, and Swabs, reduce cleaning times, pump down times and contamination levels for critical process tools.
  • ScrubDISKS® are the same patented material for use with ErgoSCRUB®.


ScrubPADS w/ Diamond Grit w/ 0.78″ Thickness

HT4514D
HT4518D
HT4522D
HT4528D
HT4536D
HT4536DS
HT4540D
HT4580D
HT4513PDs
HT4513PD
HT4520PD
HT4530PD

ScrubPADS w/ Silicon Carbide (SiC) Grit w/ 0.78″ Thickness

HT4510
HT4510S
HT4522
HT4528
HT4528-11
HT4540
HT4540S
HT4560
HT4560S
HT4580
HT4580-11
HT4512P
HT4512PS
HT4515P
HT4540PD

ScrubPADS w/ Aluminum Oxide (AO) Grit w/ 0.78″ Thickness

HT4580A
HT4512PA
HT4540PA

file_downloadsrubpad-datasheet.pdf

  • Wide grit selection allows for quick removal of process-induced residue from aluminum, stain less steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear.
  • The fiber-free construction of ScrubPADs greatly reduces particle levels in cleaned Tools.
  • By using washed abrasives, harmful ionic residues are minimized.
  • Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures.
  • Enables the elimination of H2O2 from PMs, which greatly reduces recovery times.
  • Clean and unload with UltraSOLV® Sponge for longer life.


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