Product Type:
Equipment
Application:
Wet Process
Product Description:
NDS 412/408/406 Spin Cleaner is providing:
- Automatic cleaning with atomizing cleaning nozzle
- stage made of porous metal to fix the wafers
- a range of cleaning time from 5 to 999s
- possibility to run from 4″ to 12″ wafers
- PLC with touch panel to set up recipes
- range of spining from 400 to 2800rpm with different levels of speed adjustment
See the attached file for the technical specification
file_downloadNDS-Auxiliary-Equipment.pdf
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Manual Spin System for R&D cleaning applications