By FOAMTEC
Supplier Info
Product Type:
Parts & Consumables
Application:
Cleaning Materials
Product Description:
MiraSAT™ IPA 70/30 is pre-saturated with 70% Semiconductor Grade IPA & 30% Ultrapure Water(UPW) & incorporates Foamtec’s industry-leading MiraWIPE™ Microfiber sealed edge wiper. The unique woven microfiber requires only 7 ml of solution to be uniformly dampened which enables scrubbing-like cleaning action to dislodge, entrap, and remove contaminants while reducing IPA consumption by at least 22%. MiraSAT’s super strong weave and sealed edge minimize the shedding of fibers even on textured surfaces making it ideal for equipment cleaning tasks. MiraSAT™ is manufactured and processed in an ISO 5 cleanroom. Each pack contains 20 MiraSAT™ wipers and is double-bagged to aid cleanroom entry protocols.
Benefits
- Protects VOC-sensitive fab modules such as lithography, metrology, and CVD from solvent fumes.
- Industry-leading abrasion-resistant fabric reduces the risks of fiber and particle excursions associated with fab wipers.
- Even, consistent wetting of the wiper enables excellent first-pass cleaning results and reduced cleaning time.
- Eliminates the risk of cross-contamination from soiled squirt bottles.
- Unsurpassed abrasion & snag resistance minimize scratch defects and particle excursions associated with fab wipers.
- Foamtec’s state-of-the-art ISO 5 processing facilities produce a wiper optimized for use in the most advanced wafer fabs.
- For equipment PMs, the lightly dampened, woven microfiber fabric is production proven to improve equipment uptime and first pass qual rates.
Environmental Health & Safety Benefits
Environmental Constraints for the Semiconductor Industry are only Increasing
Implementing MiraSAT™ helps wafer fabs to remain within their air permit limits while making a step change improvement in environmental compliance and cost avoidance.
• Reduce flammable chemical storage, solvent squirt bottles, and handling of IPA in the cleanroom.
• Reduce fugitive VOC emissions and air permit implications associated with solvent wiping.
• Reduce personnel exposure to isopropyl alcohol during cleanroom wipe-downs.
MiraSAT™ Microfiber Sealed Edge Cleanroom Wiper presaturated with 70% IPA & 30% Ultrapure Water. Each pack is double-bagged to aid cleanroom entry protocols.
HT5790S73
Material: Microfiber
Size: 9″ x 9″
Seal: Wide Sealed Edge
Solution: 70% IPA + 30% Ultrapure Water, 144 ml
Packaging: 20 Wipers/Bag – 20 Bags/Case
Each pack is double-bagged to aid cleanroom entry protocols.
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Foamtec’s HPM Technique
Combined with the UltraSOLV® ScrubPAD and Sponge, MiraSAT’s capabilities to dislodge, entrap, and remove stubbornly adhered contamination reduce wiper usage, hazardous waste, and equipment recovery time.
• For use in ISO Class 3 and higher cleanrooms.
• Cleaning of hi-vac process chambers and robotics in flat panel display and wafer fabs.
• Cleaning VOC-sensitive process equipment in lithography, CVD, and metrology modules.
• Cleaning baked-on resist and developer from lithography tracks.
• Final wipedown of sensitive components such as EFEMs, electrostatic chucks, VAT valves, and gas dispersion plates.
• Equipment PMs and wet cleans where the elimination of VOCs and flammable solvents are required.