Product Type:
Equipment
Application:
Wet Processing
Product Description:
The Most Advanced Spin Rinse Dryer in the Industry.
The Compass Spin Rinse Dryer offers the most advanced features found in today’s SRD. For high and low-profile cassettes, the Compass SRD is designed to reduce operating costs while meeting and/or exceeding all critical areas including clean, dry, and particle performance specifications. IDX Flexware provides advanced process control features; these features can only be found on the Compass SRD from MEI. With greater reliability, performance, and low operating costs coupled with MEI’s award-winning support, the Compass Spin Rinse Dryer is the drying solution you can trust.
Advantages
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Options
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| Model | Compass SRD Single | Compass SRD Double |
| No. of Dryers | One | Two |
| Type | Bench or stand-alone | Stand-alone |
| Cassettes | Low profile, high profile | Low profile, high profile |
| Chamber Capacity | Multiple wafer sizes for low and high-profile cassettes. Available wafer sizes are dependent upon product carrier type |
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| Door Opening | Right, left | Right, left |
| Voltage (per chamber) | 240 VAC 50 Hz, 8 A | 240 VAC 50 Hz, 15 A |
| Facilities | N2: 1/2″ O.D. @ 4–6 CFM, 30–35 psi DI: 1/2″ O.D. @ 1.5–2 GPM, Max 25–30 psi Clean Dry Air: 3/8″ OD @ 40–50 psi, 110–140 LPM Drain Connection: 1″ NPT |
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file_downloadCOMPASS-SRD-LP-HP-Data-Sheet-2015-0-3.pdf
- Drying of a wafer batch with up to 25 wafers.