CMP Spare Parts

Product Enquiry

Product Enquiry Form

Product Type:

Parts & Consumables


Application:

CMP


Product Description:

AMAT Mirra

  • Platen
  • Clamp
  • Clamp Outlet
  • Support Pad

AMAT Reflex

  • Membrane Clamp
  • Cross Over Plate
  • Head Rebuild PM Kit

EBARA

  • Seal Ring
  • Idler Roller Assembly
  • TR Guide
  • Modified Head Flange Assembly

 

We also offer Semiconductor CMP Parts Repair and other Services.

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Product Enquiry Form