Product Type:
Parts & Consumables
Application:
CMP
Product Description:
AMAT Mirra
- Platen
- Clamp
- Clamp Outlet
- Support Pad
AMAT Reflex
- Membrane Clamp
- Cross Over Plate
- Head Rebuild PM Kit
EBARA
- Seal Ring
- Idler Roller Assembly
- TR Guide
- Modified Head Flange Assembly
We also offer Semiconductor CMP Parts Repair and other Services.
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