CMP Spare Parts

Product Enquiry

Product Enquiry Form

Product Type:

Parts & Consumables


Application:

CMP


Product Description:

AMAT MIRRA

  • Platen
  • Clamp
  • Clamp Outlet
  • Support Pad

AMAT REFLEX

  • Membrane Clamp
  • Cross Over Plate
  • Head Rebuild PM Kit

EBARA

  • Seal Ring
  • Idler Roller Assembly
  • TR Guide
  • Modified Head Flange Assembly

 


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Product Enquiry Form