By WARDE
Supplier Info
Product Type: Parts & Consumables
Application: CMP Parts
CMP Spare Parts for AMAT Mirra, AMAT Reflex and EBARA Systems
We offer a comprehensive range of high-quality CMP spare parts from Warde Tec for leading semiconductor equipment, includign Applied Materials (AMAT) and EBARA systems. Our components are designed to ensure reliable performance, precision and long service life in demanding production environments, making them the perfect choice for your industrial needs.
AMAT Mirra Parts:
- Platen
- Clamp
- Clamp Outlet
- Support Pad
AMAT Reflex CMP Parts:
- Membrane Clamp
- Cross Over Plate
- Head Rebuild PM Kit
EBARA System Spare Parts:
- Seal Ring
- Idler Roller Assembly
- TR Guide
- Modified Head Flange Assembly
Our spare parts support stable and efficient CMP processes while helping to reduce downtime and maintenance costs.
In addition, we provide comprehensive semiconductor CMP services, including professional CMP parts overhaul and repair services – choose the solution that best fits you for performance, cost and uptime.
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