By WARDE
Supplier Info
Product Type: Parts & Consumables
Application: CMP Consumables
CMP Parts for AMAT and EBARA Systems
We offer a comprehensive range of high-quality silicone and rubber parts for use in leading CMP equipment from Applied Materials (AMAT) and EBARA.
For AMAT Systems:
- T1 Membrane
- Diaphragm, Rolling (T1 Head)
- 5-zone membrane
- 3-zone membrane
For EBARA Systems:
- Pressurized Sheet GE
- 8″ Membrane W RME 50
- Membrane
The components of Warde Tec are engineered to meet the demanding requirements of semiconductor manufacturing, ensuring reliability, precision, and consistent process performance.
Contact us for detailed product information.
In addition to spare parts supply, we also offer a full range of CMP services, including professional overhaul and repair solutions to extend equipment lifetime and maintain optimal performance.
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