Autosamdri®-815, Series B

Product Type:

Equipment

Application:

CPD: Critical Point Dryer

Product Description:

• Process up to 5 x 1″ wafers
• Automatic Supercritical Point Dryer
• Minimal Facility Utility Requirements
• Filtration down to 0.08µm
• Made in U.S.A.

• Microprocessor* controller allows for complete automatic processing.
• Electromagnetic valves and seals inert to LCO2, alcohols and acetone.
• Internal surfaces inert to CO2, ultra pure alcohols and acetone.
• Repeatable operating parameters insuring reproducibility of results.
• Process up to 5 x 10mm square die or 5 x 1″ diameter wafers with every run! (Tousimis HF compatible Wafer/Die Holders* are used to transport and process your MEMS devices minimizing handling).
• Integrated temperature controls.*
• Internal rupture disc built in for safety.
• LED’s instantly indicate process mode at a glance.*
• Clean room static-free compatible design.
• Complete advanced solid state reliable electronics.
• Efficient adiabatic cooling system*; cool Process Chamber from room temperature to operational temperature in less than 90 seconds!
• All electronic components meet CE, UL and/or U.S. Military Specifications.
• Static pressure control module pre-set for automatic safe pressure stability.
• 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber. *
• Under-lit chamber with viewing window facilitates operator chamber status viewing.
• Vernier Handle Meter Valves allow for repeatable precision flow control.
• SOTER™ Condenser* connects to Autosamdri®-815, Series B (SOTER™ Condenser quietly separates waste alcohol from exhaust CO2).