Product Type:
Equipment
Application:
ALD
Product Description:
Atomic Shell
Nano-Powder Coating ALD Process
For shell coating on core structure
- Reactor Volume : 100 cc ~ 500 cc
- Filter Size : Variable (0.5 µm~ )
- Reactor Heating : Max 300 ℃ (Reactor Body : more than 230 ℃)
- Reactor rotation : DC Motor Driver
- Rotation speed : 10 ~ 60 rpm
There are currently no specification available.
There are currently no downloads available.
There are currently no videos available.
- Semiconductor (DRAM, System LSI, etc)
- Display (AMOLED, Micro-OLED, etc)
- Photovoltaic (Si base PV & CIGS)
- MEMS, Sensor, Battery, etc
- Optical-, Bio-, Nano- and Flexible Devices