Product Type:
Equipment
Application:
ALD
Product Description:
Oberflächenfunktionalisierung und Core-Shell-Partikel
- Reaktorvolumen: 100 cm³ ~ 500 cm³
- Filtergröße: Variabel (0,5 µm ~)
- Reaktorheizung: Max 300 ℃
- Reaktordrehung mittels geregeltem Gleichstrommotor
- Rotation speed : 10 ~ 60 rpm
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- Semiconductor (DRAM, System LSI, etc)
- Display (AMOLED, Micro-OLED, etc)
- Photovoltaic (Si base PV & CIGS)
- MEMS, Sensor, Battery, etc