Product Type:
Equipment
Application:
CMP, Wet Processing
Product Description:
Aquarius™ Wafer Cleaner
The innovative Aquarius™ Wafer Cleaner from Axus Technology brings enhancements to all aspects of 100 mm, 150 mm, and 200 mm wafer cleaning, including defectivity and throughput. Aquarius™ boosts the efficiency of the wafer cleaning process by enabling the simultaneous processing of two different wafer sizes. With significant engineering strides that are shaping the future of wafer cleaning equipment, Axus Technology proudly introduces the top-tier wafer scrubber to the market.
Dimensions:
1780 (W) x 1420 (D) x 2490 (H) mm
Standard Features include:
- Four brush boxes with full recipe control of all critical process variables
- Two spin-rinse-dry stations
- Two wet cassette stations in and two dry stations out
- High-speed wafer handling robot with two end effectors
- All operations can be done manually from the graphical user interface
- Three different modes of control for brush/wafer contact: position, brush torque, and contact force
Optional Features:
- On-board dilution capabilities
- Flat Finder/OCR
- SMIF Version
- Integrated Metrology
file_downloadAquarius-A200-sa-rev-04-08-22.pdf
Currently, no information for the application is available.