CMP Spare Parts

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By WARDE

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You may be interested in these products:

CMP Pad Conditioner

CMP Pad Conditioner A diamond tool for the planarization of wafers. The CMP Pad Conditioner is…

HVTM/GVTM Series Pad

IV Technologies has been concentrating on developing CMP consumables for over 20 years. They offer CMP…

Product Type: Parts & Consumables

Application: CMP Parts

Product Description:

AMAT Mirra

  • Platen
  • Clamp
  • Clamp Outlet
  • Support Pad

AMAT Reflex

  • Membrane Clamp
  • Cross Over Plate
  • Head Rebuild PM Kit

EBARA

  • Seal Ring
  • Idler Roller Assembly
  • TR Guide
  • Modified Head Flange Assembly

 

We also offer Semiconductor CMP Parts Repair and other Services.

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You might be interested in:

CMP Pad Conditioner

CMP Pad Conditioner A diamond tool for the planarization of wafers. The CMP Pad Conditioner is…

HVTM/GVTM Series Pad

IV Technologies has been concentrating on developing CMP consumables for over 20 years. They offer CMP…

Product Enquiry Form

  • This field is for validation purposes and should be left unchanged.