Autosamdri®-815, Series B

Product Type:

Equipment

Application:

CPD: Critical Point Dryer

Product Description:

• Process up to 5 x 1″ wafers
• Automatic Supercritical Point Dryer
• Minimal Facility Utility Requirements
• Filtration down to 0.08 µm
• Made in U.S.A.

• Microprocessor* controller allows for complete automatic processing.
• Electromagnetic valves and seals inert to LCO2, alcohols, and acetone.
• Internal surfaces are inert to CO2, ultra-pure alcohols, and acetone.
• Repeatable operating parameters ensure the reproducibility of results.
• With every run, you can process up to 5 x 10 mm square die or 5 x 1″ diameter wafers! (Tousimis HF-compatible Wafer/Die Holders* are used to transport and process your MEMS devices, minimizing handling.)
• Integrated temperature controls.*
• Internal rupture disc built in for safety.
• LEDs instantly indicate process mode at a glance.*
• Clean room static-free compatible design.
• Complete advanced solid-state reliable electronics.
• Efficient adiabatic cooling system*; cools down the Process Chamber from room temperature to operational temperature in less than 90 seconds!
• All electronic components meet CE, UL, and/or U.S. Military Specifications.
• Static pressure control module pre-set for automatic safe pressure stability.
• 0.08 µm internal filtration system delivers clean filtered LCO2 to the process chamber. *
• An under-lit chamber with a viewing window facilitates operator chamber status viewing.
• Vernier Handle Meter Valves allow for repeatable precision flow control.
• SOTER™ Condenser* connects to Autosamdri®-815, Series B (SOTER™ Condenser quietly separates waste alcohol from exhaust CO2).