By MEI / RENA
Supplier InfoProduct Type:
Equipment
Application:
Wet Process
Product Description:
The Most Advanced Spin Rinse Dryer in the Industry.
The Compass Spin Rinse Dryer offers the most advanced features found in today’s SRD. For high and low profile cassettes, the Compass SRD is designed to reduce operating costs while meeting and/or exceeding all critical areas to include clean, dry and particle performance specifications. IDX Flexware provides advanced process control features, these features can only be found on the Compass SRD from MEI. With greater reliability, performance, and low operating costs coupled with MEI’s award-winning support, the Compass Spin Rinse Dryer is the drying solution you can trust.
Advantages
|
Options
|
Model | Compass SRD Single | Compass SRD Double |
No. of Dryers | One | Two |
Type | Bench or stand-alone | Stand-alone |
Cassettes | Low profile, high profile | Low profile, high profile |
Chamber Capacity | Multiple wafer sizes for low and high profile cassettes. Available wafer sizes are dependent upon product carrier type |
|
Door Opening | Right, left | Right, left |
Voltage (per chamber) | 240 VAC 50 Hz, 8 A | 240 VAC 50 Hz, 15 A |
Facilities | N2: 1/2” O.D. @ 4–6 CFM, 30–35 PSI DI: 1/2” O.D. @ 1.5–2 GPM, Max 25–30 PSI Clean Dry Air: 3/8” OD @ 40–50 PSI, 110–140LPM Drain Connection: 1” NPT |
file_downloadCOMPASS-SRD-LP-HP-Data-Sheet-2015-0-3.pdf
- Drying of wafer batch with up to 25 wafers