by KOVIS Technology

Wafer Dimensional Metrology
ATLANTIS™ C-SAM Inspection System
High speed Ultrasonic SAT scanning detects defects in semiconductor PKGs, HBM, TSV, and wafer bonding.
INFOHigh speed Ultrasonic SAT scanning detects defects in semiconductor PKGs, HBM, TSV, and wafer bonding.
INFOHybrid metrology system measures wafer shape, sub-micro 3D structure, roughness.
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