HF compatible wafer / chip / die holders

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By TOUSIMIS

Supplier Info

Product Type:

Parts & Consumables


Application:

Wet Processing


Product Description:

Developed and manufactured for use with Tousimis Critical Point Dryers, many customers now use these wafers and chip holders for their (small-scale) manual wet etch processes.

HF-compatible wafer holder by Tousimis

The holder is available for different wafer sizes and compatible with hydrofluoric acid, which makes it the holder of choice for many customers. It holds 5 wafers which are separated with 5 spacers. Additional spacers are available.

HF-compatible chip/die holder by Tousimis

Tousimis also offers die holders, which securely hold up to 5 dies measuring 10 mm x 10 mm square. A threaded cap helps protect your delicate devices during processing.

Please don’t hesitate to contact us if you also need chemically compatible containers.


Catalog No. Size Dimensions (I.D. / O.D. / Ht)
# 8768H 8″ – 200 mm Wafer 203.7 mm (8.02″) / 209.6 mm (8.25″) / 25.8 mm (1.0″)
# 8768A 6″ – 150 mm Wafer 152.9 mm (6.02″) / 158.8 mm (6.25″) / 25.8 mm (1.0″)
# 8768F 5″ – 125 mm Wafer 127.5 mm (5.02″) / 133.4 mm (5.25″) / 25.8 mm (1.0″)
# 8768B 4″ – 100 mm Wafer 102.1 mm (4.02″) / 108 mm (4.25″) / 25.8 mm (1.0″)
# 8768C 3″ – 75 mm Wafer 76.7 mm (3.02″) / 82.6 mm (3.25″) / 25.8 mm (1.0″)
# 8768D 2″ – 50 mm Wafer 51.3 mm (2.02″) / 57.2 mm (2.25″) / 25.8 mm (1.0″)
# 8768G 1″ – 25 mm Wafer 25.9 mm (1.02″) / 31.8 mm (1.25″) / 25.8 mm (1.0″)
# 8768E 10 mm Square Chip 30 mm (1.18″) O.D. / 28 mm (1.10″) Ht; Recommended substrate thickness: 525 µm – 725 µm

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