Parts & Consumables
Developed and manufactured for use with Tousimis Critical Point Dryers, many customers now use theese wafer and chip holders for their (small scale) manual wet etch processes.
HF compatible wafer holder by Tousimis
The holder is available for different wafer sizes and compatible with hydrofluoric acid, which makes it the holder of choice for many customers. It holds 5 wafers which are seperated with 5 spacers. Additional spacers are available.
HF compatible chip/die holder by Tousimis
Tousimis also offers die holders, which securely hold up to 5 dies measuring 10mm x 10mm square. A threaded cap helps protect your delicate devices during processing.
Please dont hesitate to contact us if you also need chemically compatible containers.
|Catalog No.||Size||Dimensions (I.D. / O.D. / Ht)|
|# 8768H||8″ – 200mm Wafer||203.7mm (8.02″) / 209.6mm (8.25″) / 25.8mm (1.0″)|
|# 8768A||6″ – 150mm Wafer||152.9mm (6.02″) / 158.8mm (6.25″) / 25.8mm (1.0″)|
|# 8768F||5″ – 125mm Wafer||127.5mm (5.02″) / 133.4mm (5.25″) / 25.8mm (1.0″)|
|# 8768B||4″ – 100mm Wafer||102.1mm (4.02″) / 108mm (4.25″) / 25.8mm (1.0″)|
|# 8768C||3″ – 75mm Wafer||76.7mm (3.02″) / 82.6mm (3.25″) / 25.8mm (1.0″)|
|# 8768D||2″ – 50mm Wafer||51.3mm (2.02″) / 57.2mm (2.25″) / 25.8mm (1.0″)|
|# 8768G||1″ – 25mm Wafer||25.9mm (1.02″) / 31.8mm (1.25″) / 25.8mm (1.0″)|
|# 8768E||10mm Square Chip||30mm (1.18″) O.D. / 28mm (1.10″) Ht; Recommended substrate thickness: 525µm – 725µm|
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