HF compatible wafer / chip / die holders

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By TOUSIMIS

Supplier Info

Product Type:

Parts & Consumables


Application:

Wet Process


Product Description:

Developed and manufactured for use with Tousimis Critical Point Dryers, many customers now use theese wafer and chip holders for their (small scale) manual wet etch processes.

HF compatible wafer holder by Tousimis

The holder is available for different wafer sizes and compatible with hydrofluoric acid, which makes it the holder of choice for many customers. It holds 5 wafers which are seperated with 5 spacers. Additional spacers are available.

HF compatible chip/die holder by Tousimis

Tousimis also offers die holders, which securely hold up to 5 dies measuring 10mm x 10mm square. A threaded cap helps protect your delicate devices during processing.

Please dont hesitate to contact us if you also need chemically compatible containers.


Catalog No. Size Dimensions (I.D. / O.D. / Ht)
# 8768H 8″ – 200mm Wafer 203.7mm (8.02″) / 209.6mm (8.25″) / 25.8mm (1.0″)
# 8768A 6″ – 150mm Wafer 152.9mm (6.02″) / 158.8mm (6.25″) / 25.8mm (1.0″)
# 8768F 5″ – 125mm Wafer 127.5mm (5.02″) / 133.4mm (5.25″) / 25.8mm (1.0″)
# 8768B 4″ – 100mm Wafer 102.1mm (4.02″) / 108mm (4.25″) / 25.8mm (1.0″)
# 8768C 3″ – 75mm Wafer 76.7mm (3.02″) / 82.6mm (3.25″) / 25.8mm (1.0″)
# 8768D 2″ – 50mm Wafer 51.3mm (2.02″) / 57.2mm (2.25″) / 25.8mm (1.0″)
# 8768G 1″ – 25mm Wafer 25.9mm (1.02″) / 31.8mm (1.25″) / 25.8mm (1.0″)
# 8768E 10mm Square Chip 30mm (1.18″) O.D. / 28mm (1.10″) Ht; Recommended substrate thickness: 525µm – 725µm

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