Gemini Multi-Chamber Stripper

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By TRION

Supplier Info

Product Type:

Equipment

Application:

Dry Processing & UHP

Product Description:

The Gemini is a compact multi-chamber, high throughput stripping system that is designed specifically for the demands of today’s production fabs. This versatile and affordable system can be configured with a 200 mm or 300 mm chuck. As required by the application, this system can incorporate a microwave source (which is both reliable and free from typical microwave tuning problems) or ICP technology.

By employing ICP, microwave and RF bias power difficult to remove layers of resist can be removed at low temperatures.

  • Etch rates up to 6 μm/min
  • High throughput
  • Low plasma damage
  • Automatic tuning
  • 100 mm to 300 mm wafers
  • Small footprint
  • Competitively priced

MEMS, Compound Semiconductor, Advanced Packaging.

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