By FASTMICRO
Supplier Info
Product Type:
Equipment
Application:
Equipment Others, Optical Surface Inspection
Product Description:
Precision Surface Particle Measurement
Purpose and Working Principle
The Fastmicro Sample Scanner is a surface particle measurement system for validating and monitoring product cleanliness. It measures surface particle contamination indirectly by scanning compatible samplers, such as PMC 2.0 or the Fastmicro Sampler, after particles have been collected from a product, assembly, workspace or other surface. This workflow enables robust measurements on difficult-to-reach, curved or relatively rough surfaces without causing cross-contamination.
Fast and Efficient Operation in Production, QC, and R&D
The system is designed for fast operator use in production, quality control and R&D environments. Samples are measured within seconds, and the resulting operator workflow can be completed in less than one minute.
Digital Particle Analysis for Maximum Process Reliability
The digital output includes objective particle data such as count, position and size, supporting repeatable pass/fail qualification, SPC monitoring and deeper analysis by advanced users.
Advanced Measurement Capabilities for Maximum Flexibility
In addition to indirect sampler measurements, the Fastmicro Sample Scanner can also support direct measurement with SEMI-standard 2-inch silicon wafers via the corresponding interface.
The Fastmicro Sample Scanner is suitable for:
- Clean product qualification
- Assembly cleanliness checks
- Cleaning process qualification
- Cleanroom and workspace cleanliness monitoring
It is ideal for applications requiring quantitative and reproducible surface cleanliness data.
| Model: | FM-PS-SAS-V01; CE certified; EMC industrial norm |
| Measurement principle: | surface particle measurement; indirect measurement with compatible samplers (PMC 2.0 or Fastmicro Sampler) and Sampler Holder |
| Direct measurement option: | SEMI-standard 2-inch silicon wafers with matching interface/recipe |
| Lower detection limit: | 0.5 µm PSL-equivalent particles (NIST certified) |
| Field of View / particle detection area: | Ø 14 mm on PMC 2.0; Ø 20 mm on Fastmicro Sampler and 2-inch wafer |
| Reproducibility: | relative count variant smaller than 10%; GR&R report available on request |
| Sizing accuracy: | within 20% for PSL-equivalent particles (NIST certified) |
| Remeasurability: | non-destructive measurement; no added contamination caused by measurement |
| Sampler performance: | Fastmicro Samplers with >90% particle pickup efficiency; no measurable residue reported |
| Data output & visualization: | quantity, position and size of particles; annotated image with particle detection overlay; 3D signal representation of selected particles; raw image detail view |
| Exports / data exchange: | KLARF and .csv export; USB or Ethernet connection; remote access feature included |
| Reporting: | optional qualification report in UI and PDF according to ISO 14644-9 |
| Operating environment: | clean environment, ISO 7 according to ISO 14644-1 / class 10,000 FED STD 209E or cleaner |
| Dimensions / weight: | scanner 615 × 300 × 460 mm (L×W×H); net weight 16 kg |
| Packaging: | IPCC-certified plywood pallet box 710 × 530 × 670 mm (L×W×H); net weight 45 kg |
| Included: | keyboard, mouse, power cord, HDMI cable, 2× PMC 2.0 in a box |
| Software / documentation language: | English |
| Optional upgrades: | 2-inch Wafer Interface + recipe; Fastmicro Surface Particle Sampler Kit + recipe; Sampler SEM stub / Sampler Particle Trap Holder; stand-alone software license; advanced workflow and reporting software license; supervisor training |
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- Clean product qualification
- Clean assembly qualification
- Cleaning process qualification and pass/fail control
- Quality control for parts and assemblies
- Cleanroom cleanliness monitoring
- Workspace cleanliness monitoring
- Surface sampling on rough, curved or difficult-to-reach surfaces
- Production operator checks, R&D analysis and SPC monitoring