Automegasamdri®-936

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By TOUSIMIS

Supplier Info

Product Type:

Equipment


Application:

CPD: Critical Point Dryer


Product Description:

  • Process up to Five 6″ Wafers per Process Run
  • Touchscreen Programmable Interface
  • First Time Ever…Previous Run Data Review
  • Integrated Chiller Loop Decreases LCO2 Consumption
  • Easy Facilitation with Small Foot Print Design
  • A dedicated initial Slow Fill into the process chamber allows ideal fluid dynamics preserving the most sensitive micro devices.
  • Maintenance made easy via accessible components including the external Post-Purge-Filter assembly.
  • Patent Pending „Vortex Swirl“: Non-mechanical stirring chamber allowing for fluid dynamic exchange without the need for particle generating friction causing devices.
  • Extremely Efficient integrated Closed Cooling Loop dropping chamber temperature quickly for shorter process run times.
  • The internal SOTER(tm) condenser quietly captures and separates CO2 exhaust and waste alcohols.
  • Our original Chamber Inserts enable chamber I.D. variance of chamber I.D. maximizing efficiency in LCO2 consumption, process time, and providing multiple size wafer process capability!
  • Process chamber LCO2 filtration down to 0.08µm with 99.999%+ particle retention.
  • Processes up to five 6″ wafers each run. Included are the following HF Compatible Wafer Holders: 6″, 4″, 3″, 2″ and 10mm Die Holders.
  • Chamber Illumination via viewing window facilitates chamber status visualization.
  • Automatic process with factory default recipe or the ability to customize your own!
  • All internal surfaces are inert to CO2 and ultrapure alcohols.
  • Repeatable operating parameters insuring „reproducibility“ of results.
  • Safety operation features integrated into both temperature and pressure automatic regulation.
  • All electronic components meet CE, UL and/or U.S. Military Specifications.
  • Clean room static-free compatible design.


  • Cabinet: 19.8″ (50.3cm) Width x 31.7″ (80.6cm) Depth x 44.5″ (113.0cm) Height
  • System Set-Up Area Footprint: 27″ (68.6cm) Width x 38″ (96.5cm) Depth
  • Chamber size: 6.50″ I.D. x 1.25″ Depth / Chamber volume: 679 ml
  • 120V or 220V / 50-60Hz
  • LCO2 flow is precisely controlled through Micro Metering Valves with Vernier handles for adjustment ease.

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