Product Type:
Parts & Consumables
Application:
Handling, Wafer Cassette
Product Description:
Metal Cassette -Capacity use in different semiconductor to load semiconductor, LED epitaxy chip, germination chip, wafer, in LED germination epitaxy solar wafer process, high temperature resistant, transfer in factory.
Able to do laser engraving. Able to install RFID. Keep the track of carrier and material.
CK2-25-Metal
- Product name：2″ Metal Cassette
- Dimension：142.6(L) x 62(W) x 58.5(H)mm
- Weight：
- Capacity：25 PCS
- Wafer size：2 inch (Ø50mm)
- Material：Metal
CK4-25-Metal
- Product name：4″ Metal Cassette
- Dimension：143(L) x 125.5(W) x 115(H)mm
- Weight：
- Capacity：25 PCS
- Wafer size：4 inch (Ø100mm)
- Material：Metal
CK6-25-Metal
- Product name：6″ Metal Cassette
- Dimension：150(L) x 160(W) x 170(H)mm
- Weight：1200g
- Capacity：25 PCS
- Wafer size：6 inch (Ø150mm)
- Material：Metal
CK8-25-Metal
- Product name：8″ Metal Cassette
- Dimension：214(L) x 202.7(W) x 206(H)mm
- Weight：3300g
- Capacity：25 PCS
- Wafer size：8 inch (Ø200mm)
- Material：Metal
CK12-25-Metal
- Product name：12″ Metal Cassette
- Dimension：380(L) x 388.8(W) x 312(H)mm
- Weight：4000g
- Capacity：25 PCS
- Wafer size：12 inch (Ø300mm)
- Material：Metal
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For high temperature processes