PFA Wafer Cassette

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Product Type:

Parts & Consumables


Application:

Wafer Handling


Product Description:

PFA Cassette / Teflon Cassette of the wafer can be customized and designed by customers’ request, able to resist strong acid, strong hydrofluoric acid, strong base and heat up to 200–220℃, used to deliver wafers in acid & base process of Fabrication factory.


CK2-25-PFA

  • Product name:2″ Teflon Cassette / PFA Cassette
  • Dimension:142.1 (L) x 67.08 (W) x 59 (H) mm
  • Weight:194.5 g
  • Capacity:25 pcs (Beans)
  • Wafer size:2″ (Ø 50 mm) Thickness 0.5–0.7 mm
  • Material:Teflon / PFA
  • Slot Pitch:4.76 mm

CK2.5-25-PFA

  • Product name:2.5″ Teflon Cassette / PFA Cassette
  • Dimension:142 (L) x 79 (W) x 73 (H) mm
  • Weight:231 g
  • Capacity:25 pcs
  • Wafer size:2.5″
  • Material:Teflon / PFA

CK3-25-PFA

  • Product name:3″ Teflon Cassette / PFA Cassette
  • Dimension:142.49 (L) x 94.36 (W) x 82.53 (H) mm
  • Weight:354.5 g
  • Capacity:25 pcs
  • Wafer size:3″ (Ø 75 mm)
  • Material:Teflon / PFA

CK4-25-PFA

  • Product name:4″ Teflon Cassette / PFA Cassette
  • Dimension:125 (L) x 140 (W) x 113 (H) mm
  • Weight:571 g
  • Capacity:25 pcs
  • Wafer size:4″ (Ø100 mm)  Thickness 0.5–0.7 mm
  • Material:Teflon / PFA
  • Slot Pitch:4.76 mm

CK4-25-PFA (Hollow)

  • Product name:4″ Teflon Cassette / PFA Cassette (hollow)
  • Dimension:125 (L) x 140 (W) x 113 (H) mm
  • Weight:429.5 g
  • Capacity:25 pcs
  • Wafer size:4″ (Ø 100 mm), Thickness 0.5–0.7 mm
  • Material:Teflon / PFA
  • Slot Pitch:4.76 mm

CK5-25-PFA

  • Product name:5″ Teflon Cassette / PFA Cassette
  • Dimension:152.4 (W) x 142.88 (L) x 146.05 (H) mm
  • Weight:607.4 g
  • Capacity:25 pcs
  • Wafer size:5″ (Ø 125 mm), Thickness 0.5–0.7 mm
  • Material:Teflon / PFA
  • Slot Pitch:4.76 ± 0.38 mm

CK6-25-PFA

  • Product name:6″ Teflon Cassette / PFA Cassette
  • Dimension:179 (L) x 147 (W) x 175 (H) mm
  • Weight:1045.4 g
  • Capacity:25 pcs
  • Wafer size:6″ (Ø 150 mm)
  • Material:Teflon / PFA
  • Slot Pitch:4.76 mm

CK8-25-PFA

  • Product name:8″ Teflon Cassette / PFA Cassette
  • Dimension:233 (L) x 220 (W) x 225 (H) mm
  • Weight:1407 g
  • Capacity:25 pcs
  • Wafer size:8″ (Ø 200 mm)
  • Material:Teflon / PFA

CK6-12-PFA

  • Product name:6″ Teflon Cassette / PFA Cassette
  • Dimension:177 (L) x 145 (W) x 173 (H) mm
  • Weight:860 g
  • Capacity:12 pcs
  • Wafer size:6″ (Ø 150 mm)
  • Material:Teflon / PFA

CK8-13-PFA

  • Product name:8″ Teflon Cassette / PFA Cassette
  • Dimension:203.05 (L) x 233.05 (W) x 218.44 (H) mm
  • Weight:1800 g
  • Capacity:13 pcs
  • Wafer size:8″ (Ø 200 mm)
  • Material:Teflon / PFA

CK12-13-PFA

  • Product name:12″ Teflon Cassette / PFA Cassette
  • Dimension:355 (L) x 180 (W) x 325 (H) mm
  • Weight:3600 g
  • Capacity:13 pcs
  • Wafer size:12″ (Ø 300 mm)
  • Material:Teflon / PFA
  • Slot Pitch:4.76 mm

CK6-25-PFA (Low Profile)

  • Product name:6″ Teflon Cassette / PFA Cassette (Low Profile)
  • Dimension:177 (L) x 140 (W) x 115 (H) mm
  • Weight:666.9 g
  • Capacity:25 pcs
  • Wafer size:6″ (Ø 150 mm)
  • Material:Teflon / PFA

CK8-25-PFA (Low Profile)

  • Product name:8″ Teflon Cassette / PFA Cassette (Low Profile)
  • Dimension:235 (L) x 215 (W) x 160 (H) mm
  • Weight:1407 g
  • Capacity:25 pcs
  • Wafer size:8″ (Ø 200 mm)
  • Material:Teflon / PFA

 

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  • PFA Cassette / Teflon Cassette, The Capacitor of the wafer can be customized and designed by customers’ request, able to resist strong acid, strong hydrofluoric acid, and strong base, and heat up to 200–220℃, used to deliver wafers in acid & base process of Fabrication factory.
  • Able to do laser engraving、
  • Able to install RFID. Keep track of carrier and material.



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