By JABIL
Supplier Info
Product Type:
Metrology & Handling
Application:
Automation
Product Description:
The WaferMate200 Series wafer handler is a highly configurable wafer and substrate handling platform that is primarily designed to handle Semi-standard 100 mm to 200 mm wafers, but can also be configured to accommodate a wide range of other substrate types. The WaferMate200 is certified to meet CE, S2, and S8 requirements and is designed to meet ISO Class 4 cleanliness levels. The WaferMate200 can be designed to accommodate up to four (3) SEMI standard open cassettes and single or dual end-effector robots. Workcell control and communication with the customer’s equipment host is streamlined via CHAD’s WaferWare software.
The WaferMate200 Series is primarily designed to accommodate a range of 50 mm, 100 mm, 125 mm, 150 mm, and 200mm wafers without mechanical changeover. It can also be configured to handle “non-standard” wafer types, including thin, warped, double-sided, and rectangular substrates. The WaferMate200 Series can accommodate any SEMI standard open cassette.
Repeatability
- Robot: ± 100 µm
- Pre-aligner: ± 2.5 mm ± 0.05 deg. (theta)
- Wafer Swap Time
- Single arm: 20 sec
- Dual-arm robot: 4 sec (optional)
- Cleanliness
- ISO Class 4 (optional).
- Reliability
- Wafer Transfer Robot: 60,000 hrs
- Compliance
- CE
- SEMI S2, S8 additional specs to be listed
file_downloadJabil-Chad-Automation-WaferMate200-Product-Sheet.pdf
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With appropriate end-effectors and other application-specific tooling, the workcell is capable of handling the following materials:
• Silicon
• Glass
• Trenched
• Warped
• Thin
• Perforated
• Substrates
• Reticles
• Glass
• Trenched
• Warped
• Thin
• Perforated
• Substrates
• Reticles
The workcell generally handles wafers warped to 1% of the diameter without special consideration. Up to 5% warpage has been handled with appropriate tooling. A review of actual wafer samples is required to determine the appropriate tooling modifications.
Notch, flat, multiple notches and flats, no notches or flats can all be accommodated on the system.
Notch, flat, multiple notches and flats, no notches or flats can all be accommodated on the system.
CHAD can develop custom cassettes to accommodate warped and thin wafers.