Metrology & Handling
Process Tool Automation
The WaferMate200 Series is primarily designed to accommodate a range of 50mm, 100mm, 125mm, 150mm and 200mm wafers without mechanical changeover. It can also be configured to handle “non-standard” wafer types including thin, warped, double-sided, and rectangular substrates. The WaferMate200 Series can accommodate any SEMI standard open cassette.
- Robot: +/- 100 µm
- Pre-aligner: +/- 2.5mm+/- 0.05 deg. (theta)
- Wafer Swap Time
- Single arm: 20 sec
- Dual arm robot: 4 sec (optional)
- ISO Class 4 (optional).
- Wafer Transfer Robot: 60,000 hrs
- SEMI S2, S8 additional specs to be listed
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Notch, flat, multiple notches and flats, no notches or flats can all be accommodated on the system.