Local film thickness variations as small as a few Ansgstroms are easily captured by the sytem. The variations can be caused by substrate defects such as left-over stains as seen on the right side.
Application_Display_ITO
Semiconductor / MEMS » Metrology & Handling » Optical Surface Inspection » PrimaScan™ Series » Application_Display_ITO
Posted on August 16, 2022 by Stefanie Munding -
Local film thickness variations as small as a few Ansgstroms are easily captured by the sytem. The variations can be caused by substrate defects such as left-over stains as seen on the right side.