By ASFLOW
Supplier Info
Product Type:
Equipment
Application:
Dry Processing & UHP
Product Description:
ASFLOW precision valves and regulators are designed for high-purity semiconductor gas delivery systems, ensuring precise flow control, exceptional sealing, and long-lasting performance.
Manufactured from high-quality SUS316L stainless steel (single or double melt), with options like PCTFE, PFA, or PI seats, ASFLOW valves provide outstanding corrosion resistance, minimal particle generation, and compliance with SEMI surface roughness standards (Ra ≤ 5 μinch).
The product range includes diaphragm valves (manual and pneumatic), bellows valves, check valves, and high-pressure regulators, available in various sizes from 1/4″ to 3/4″ and larger (for bellows valves).
ASFLOW valves undergo rigorous testing, including helium leak tests, particle inspections, and high-purity cleaning, ensuring reliable and safe operation in critical gas supply systems.
With short lead times, competitive pricing, and proven quality, ASFLOW valves and regulators offer a comprehensive solution for semiconductor manufacturing and other ultra-high purity applications.
| Body Material: | SUS316L (Single Melt / Double Melt) |
| Seat Material: | PCTFE / PFA / PI |
| Diaphragm: | Ni-Co Alloy / ELGILOY® (depending on type) |
| Max. Working Pressure: | 1 MPa to 20.6 MPa (depending on type) |
| Max. Working Temperature: | -10°C to +150°C |
| Surface Roughness: | Ra ≤ 5 μinch / Ry ≤ 0.7 μm (SEMI Standard) |
| Helium Leak Test: | ≤ 1×10⁻⁹ mbar.l/sec |
| Particle Inspection: | 0.1 μm / No count (1 CFM @ 30-60 psi N₂) |
| Connections: | Male, Female, Lok, Butt Weld, Rotatable Male |
| Sizes: | 1/8″, 1/4″, 3/8″, 1/2″, 3/4″, 1″, 1.5″ |
- Semiconductor manufacturing
- MEMS (Micro-Electro-Mechanical Systems) fabrication
- Flat panel display production
- Photovoltaic cell manufacturing
- LED production
- Research & Development (R&D) for high-purity gas systems
- Critical gas supply systems requiring ultra-high purity and precise flow control