Minilock – Phantom RIE

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By TRION

Supplier Info

Product Type:

Equipment

Application:

Dry Processing & UHP

Product Description:

The Minilock – Phantom RIE is a Reactive Ion Etch system with a vacuum loadlock. The Loadlock allows the main chamber to continue pumping whilst a sample is loaded, or unloaded, and is ideal for toxic gas chemistries.

The system is highly configurable with such options as an ICP, and endpoint.

There are currently no specification available.

There are currently no videos available.

Compound Semiconductor, Failure Analysis, Research & Development, Pilot Line.

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