By ASFLOW
Supplier Info
Product Type:
Equipment
Application:
Dry Processing & UHP
Product Description:
ASFLOW filters and diffusers are precision-engineered for ultra-high purity (UHP) gas delivery systems in semiconductor, MEMS, LED, photovoltaic, and other advanced industries. These components ensure maximum process safety by delivering reliable particle retention down to 0.0025 µm (LRV9), outstanding corrosion resistance, and ultra-low pressure drop.
Manufactured from SUS316L stainless steel or Hastelloy C-22, ASFLOW filters and diffusers meet stringent SEMI surface finish standards (Ra ≤ 5 µinch or <0.25 µm for bulk filters) and undergo rigorous helium leak testing (≤ 1×10⁻¹⁰ atm·cc/sec) and particle validation according to SEMI F70 standards.
ASFLOW’s product range includes:
- Stainless Steel Gas Filters for general UHP applications
- Hastelloy Gas Filters for corrosive gases
- Gasket Filters for point-of-use protection (down to 0.3 µm)
- Bulk Gas Filters for high-flow lines up to 20,000 SLPM
- Diffusers for gas dispersion control with zero particle shedding
Available in a variety of sizes (1/4″ to 2″), connection types (Male, Female, LOK, Butt Weld, Flange), and customized designs upon request. All products are ultra-cleaned, packaged in cleanroom environments, and certified for use in the most demanding UHP gas delivery systems.
| Body Material: | SUS316L / Hastelloy C-22 (depending on type) |
| Filtration Efficiency: | ≥ LRV9 down to 0.0025 µm (standard filters) / 0.3 µm (Gasket Filters) |
| Rated Flow: | 20 SLPM to 20,000 SLPM (depending on type) |
| Max. Inlet Pressure: | up to 21 MPa (210 bar) |
| Max. Differential Pressure: | up to 15 MPa (153 bar) |
| Max. Operating Temperature: | up to 460°C (inert gas) |
| Surface Finish: | ≤ Ra 5 µinch (standard) / <0.25 µm (bulk filters) |
| Helium Leak Rate: | ≤ 1×10⁻¹⁰ atm·cc/sec |
| Particle Validation: | Zero particle contribution per SEMI F70-0302 |
| Connections: | Male, Female, LOK, Butt Weld, Flange |
| Sizes: | 1/4″, 3/8″, 1/2″, 3/4″, 1″, up to 2″ |
| Custom Options: | Available upon request |
- Semiconductor manufacturing
- MEMS (Micro-Electro-Mechanical Systems) fabrication
- Flat panel display production
- Photovoltaic cell manufacturing
- LED production
- Research & Development (R&D) for high-purity gas systems
- Bulk gas filtration and diffusion in critical process lines