By LEVITRONIX (UK)
Supplier Info
Product Type:
Parts & Consumables
Application:
Wet Processing
Product Description:
The Levitronix® BPS-iF30 flow controller is designed for ultrapure processing of delicate fluids in microelectronic wet applications. Based on active magnetic levitation, the pump impeller is suspended and driven by the magnetic field of the motor. The wide gap ensures that there is no mechanical contact between moving parts and therefore no wear. There are no bearings to wear out or seals to break down. The motor and pump controller, as well as the flow converter, are integrated into the driver housing resulting in a significantly reduced footprint. The impeller and casing are both made from chemical-resistant high purity fluoropolymer resins. Fluid flow rate and pressure are precisely controlled by electronically regulating the impeller speed.
Max. Flow
7.4 liters/min (2 gallons/min)
Max. Pressure
1.5 bar (22 psi)
Flow Control Range
4 litres/min
Wet Material
PTFE
Levitronix BPS-iF30 is an ultrapure, bearingless mag-lev flow controller for semiconductor wet processing. It delivers particle-free, low-shear, pulsation-free flow with high precision, compact footprint, and exceptional reliability—perfect for CMP, plating, and wafer cleaning.