By NOVASEN
Supplier Info
Product Type:
Parts & Consumables
Application:
Dry Processing & UHP
Product Description:
NOVASEN’s APC Butterfly Valves are high-performance vacuum control valves designed specifically for use in semiconductor processing and other high-precision applications. They offer excellent control, rapid actuation and flexible configuration options.
Highly configurable to fit any application
The NOVASEN APC Butterfly Valve series delivers high precision, modularity, and robust performance across a wide range of vacuum and pressure applications. Its structured model configuration, combined with multiple sealing, body material, and interface options, ensures flexibility, while detailed performance specs guarantee reliability and control for demanding environments. Equipped with professional software tools and featuring long operational life, these valves are a dependable choice for industrial and semiconductor-grade vacuum control.
You will find technical details such as the exact dimensions of each APC Butterfly Valve, the available electrical connections and examples of control performance in the brochure, which is available to download.
Key Features:
- Sealing Type: options such as Non‑Sealing, Standard Sealing, F‑cup Sealing
- Flange Size: DN025 up to DN320
- Connection Standard: ISO‑KF, ISO‑F, CF‑F
- Body Material / Finish: options include Aluminum or Stainless steel
- Communication Interface: RS‑232/422/485, Logic, DeviceNet®, Profibus®, Ethernet, CC‑Link, EtherCAT
- Power Option: Basic, with ±15 V SPS, PFO, or combinations of SPS and PFO
- Quantity of Sensors: 1 or 2 sensors
- Version Code: R00 onwards
Operational Performance
- Vacuum control range: from ultra-high vacuum (~1×10⁻⁸ mbar) to positive pressure (up to 1.2 bar abs)
- Leak tightness: ≤ 1×10⁻⁹ mbar·L/s external leak rate at 20 °C
- Control precision: Pressure accuracy of ±0.1 % or 5 mV, and exceptionally fine position control resolution (up to 20,000 discrete steps)
- Actuation speed: Typical opening and closing in ~0.3 seconds
- Service life: Over 2 million cycles under clean, unheated conditions
Designed with minimal dead volume and high conductance in open state, these valves support fast response and tight process control.
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- Plasma etching (Dry Etching)
- PECVD / LPCVD
- PVD
- ALD
- Vacuum drying, evacuation, pressure control
Ideal for semiconductor fabrication tools where:
- Precise vacuum regulation is critical
- Fast cycling and high duty performance are required
- Clean, leak-tight operation under variable pressure is mandatory
- Integration with digital fieldbus and control networks is needed