Products » Semiconductor / MEMS » Parts and Consumables » Dry Processing Parts & UHP

Dry Processing Parts & UHP

S3 offers a comprehensive range of Spare Parts for Dry Processing equipment – such as for LAM Research – and for Ultra High Purity (UHP) fluid control and filtration systems.

by NOVASEN

Image of the Economic Butterfly Valve from NOVASEN, a high-performance vacuum control valve.

Dry Processing & UHP

APC Butterfly Valve Eco

Economic Type of the modular high-performance vacuum control valves.

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by NOVASEN

Dry Processing & UHP

APC Pendulum Valve

Modular high-performance vacuum valve, specially developed for semiconductor manufacturing.

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by NOVASEN

Image of the Butterfly Valve DN100 from NOVASEN, a high-performance vacuum control valve.

Dry Processing & UHP

APC Butterfly Valve

Modular high-performance vacuum control valves.

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by ASFLOW

Two small flange fitting components for ultra high purity gas systems used in the semiconductor industry.

Dry Processing & UHP

Fittings

Precision fittings for semiconductor gas systems, designed for purity and reliability.

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by ASFLOW

Several diffusers from ASFLOW for ultra-high purity gas delivery in semiconductor and high-tech industries.

Dry Processing & UHP

Filters & Diffusers

For semiconductor gas systems.

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by ASFLOW

Image of a forged Type Pneumatic Diaphragm Valve from Asflow.

Dry Processing & UHP

Valves & Regulators

For high-purity semiconductor gas systems.

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by WILLBE S&T

Other Parts

Parts for CMP, CVD, Etch, Photo

Parts for CMP, CVD, Etch, Photo and Semiconductor Applications.

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