Discover Lumina Innovative Optical Inspection Systems for full-surface defect detection, mapping, and classification on transparent, translucent, and opaque substrates as well asPhaosTech Optical Microscopes.
All-surface contamination and defectivity inspection and imaging for wafers, reticles, and panel level substrates, ≤ 600...
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Subsurface defect inspection and classification for silicon carbide (SiC) and gallium nitride (GaN) based wafers and...
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All-surface contamination and defectivity inspection and imaging for wafers, reticles, and panel level substrates, 100–450 mm,...
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