Narrow type AMR

Product Type:

Metrology & Handling

Application:

Automation

Product Description:

The Narrow AMR (Autonomous Mobile Robot) is an intelligent solution for highly precise, space-saving material logistics in modern semiconductor fabs with carrier types 12″ FOUP / FOSB, Metal Cassette… Specifically designed for narrow production environments, this autonomous mobile robot combines maximum efficiency with high process reliability, ensuring smooth material flow even in confined spaces.

With a capacity of up to 4 FOUPs, the Narrow AMR is ideally suited for wafer manufacturers, foundries, as well as wafer bumping and wafer probing applications. It enables stable, continuous transport between process steps, contributing significantly to improved equipment utilization and overall productivity.

A key highlight is its seamless navigation and safety system: advanced sensor technology eliminates blind spots in positioning and obstacle detection. This is complemented by a secondary positioning system with omnidirectional wheels and visual fine alignment, ensuring maximum precision even in narrow aisles.

For highest handling accuracy, the system features an integrated robotic arm with 2.5D vision, enabling precise coordinate calibration across 6 degrees of freedom. Even complex pick-and-place tasks are executed reliably and with high repeatability.

The integrated 6-axis collaborative robot, certified according to ISO 10218-1 and ISO 15066, ensures maximum safety in human-machine interaction, ideal for flexible and scalable production environments.

Carrier Type: 12″ FOUP / FOSB, Metal Cassette,…
Applications: Wafer Manufacturer, Foundry, Wafer Bumping, Wafer Probing

Features:
• No blind spots in navigation positioning / safety detection
• Secondary body positioning – Omnidirectional wheels/visual precise alignment
• Robotic arm 2.5D vision – 6 degrees of freedom coordinate calibration
• 6-axis Collaborative Robot with ISO 10218-1 & 15066 Certification
• SEMI-S2, -S8, -S10, -S13, -S14, -S17 & -S22 Certification
• Support LF RFID / UHF RFID / BARCODE READER
• Support E84 SEMI standard
• Support SEMI SECS/GEM (GEM300 REPORT)