By NOVASEN
Supplier Info
Product Type:
Parts & Consumables
Application:
Dry Processing & UHP
Product Description:
Precise vacuum control with the APC Pendulum Valve Series
The NOVASEN APC Pendulum Valve Series offers advanced vacuum control solutions, engineered for high-performance industrial environments. Designed with flexibility, durability and precise control in mind, these valves are ideal for applications ranging from semiconductor manufacturing and thin-film deposition to analytical equipment. Thanks to their modular design, which supports various flange sizes, body finishes, sealing options and communication interfaces, the APC series can be seamlessly integrated into both new and existing vacuum systems.
Whether you require fast response times, ultra-high vacuum compatibility or robust fail-safe features, the APC Pendulum Valve delivers uncompromising reliability and control.
Key Features
- Precise Vacuum Control: High-resolution valve positioning with excellent control accuracy
- Ultra-High Vacuum Capability: Leak rate ≤ 1×10⁻⁹ mbar L/s, ideal for demanding vacuum environments
- Wide Pressure Range: Operates from ultra-high vacuum up to 1.2 bar abs
- Flexible Configuration: Multiple options for flange sizes, sealing types, body finishes, and sensor setups
- Durable & Long-Lasting: Designed for up to 2 million cycles before maintenance
- Fast Response Time: Typical actuation time of ~0.3 seconds
- Multiple Communication Interfaces: Including RS-232, RS-485, Logic, DeviceNet®, Profibus®, EtherCAT, and more
- Power-Fail Safety Options: PFO and SPS options ensure safe operation in critical systems
- Robust Construction: Stainless steel or aluminum body with optional hard-anodized or nickel-coated surfaces
- Versatile Integration: Suitable for semiconductor, coating, R&D, and general vacuum systems
Why Choose APC Pendulum Valve by NOVASEN?
- Tailored Configuration: Full customization of components—from flange size and finish to safety power setups and communication interface.
- Exceptional Durability: Body finishing options like hard-anodization or nickel coating enhance wear and corrosion resistance.
- Operational Safety: Power failure options (PFO) ensure safe valve behavior in critical situations.
- Easy System Integration: Straightforward support for multiple control protocols (RS‑232, RS‑485, DeviceNet®, EtherCAT, etc.) for seamless compatibility.
- Enhanced Monitoring: Sensor options aid in precise feedback and system diagnostics.
You will find technical details such as the exact dimensions of each APC Pendulum Valve, the available electrical connections and examples of control performance in the brochure, which is available to download.
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Key elements include:
- Sealing Type: options such as Non‑Sealing, Standard Sealing, F‑cup Sealing
- Flange Size: DN025 up to DN320
- Connection Standard: ISO‑KF, ISO‑F, CF‑F
- Body Material / Finish: options include Aluminum or Stainless steel
- Communication Interface: RS‑232/485, Logic, DeviceNet®, Profibus®, Ethernet, CC‑Link, EtherCAT
- Power Option: Basic, with SPS, PFO, or combinations of SPS and PFO
- Quantity of Sensors: 1 or 2 sensors
- Version Code: from R00 through RZZ
Technical Specifications
- Pressure Operating Range: From ultra-high vacuum (1×10⁻⁸ mbar abs) up to 1.2 bar abs at 20 °C
- Leak Rate to Atmosphere: ≤ 1×10⁻⁹ mbar L/s at 20 °C
- Duty Life: Approximately 2,000,000 cycles until first maintenance (under clean, unheated conditions)
- Operating Temperature: Ambient range from +10 °C to +150 °C
- Mounting Position: Flexible – the control unit requires support when installed on horizontal ISO‑KF piping to prevent unit hanging
- Materials in Contact with Vacuum: Body and plate are Stainless Steel 304 or Aluminum 6061; shaft is Stainless Steel 316L; screws Stainless Steel 304; standard seal is Viton®; slide bearing uses iglidur® X
Control Performance
- Control Accuracy: Better of 5 mV or 0.1% of setpoint
- Position Resolution: 20,000 steps across 0–90° or typical resolution of 8,000 steps
- Actuation Time: Typical opening/closing each ~0.3 s (Htc source gives <1.2 s)
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These APC Pendulum Valves are typically used in industrial vacuum systems where controlled opening/closing under varying vacuum loads is critical. They support reliable vacuum isolation or regulation across processes such as coating, deposition, semiconductor manufacturing, or vacuum conveying.