Product Type:
Metrology & Handling
Application:
Wafer Handling
Product Description:
NADAtech T Series 300 mm sorters are FOUP/FOSB carrier compatible for fully integrated or port specific 150 mm / 200 mm / 300 mm bridge configurations. Available with 2 to 8 stations with inline and back-to-back configurations. Each system can be tailored to your specific needs by adding preferred Sorter+ options.
- 2–4 Port Inline Versions, 4–8 Port Back-to-Back Versions with Industry Standard 300 mm Loadports available
- HIGHEST Reliability with Industry Standard Dual Yaw Trackless OEM Robotics
- Full Implementation of GEM300 Standards and Sorting Package for Fully Automated 300 mm Fabs
- includes ALL of NADAtech Sorter+ options
- Edge Grip or Vacuum Backside Endeffectors
- Highly Fexible DPSA 300wph OCR Workflow with IOSS OCR
- OHT Handoff or Stocker Embedded
- Integrated RFID and E84 OHT Delivery Options
- 150 mm / 200 mm / 300 mm Vacuum Backside or Edge Aligners
- UPS Power Backup +Vacuum Reservoir
- Experienced on-site consultation for specific requirements free of charge
Optional Features:
- ChipChecker™ (>350 um)
- ChipCheckerPro™ (>40 um)
- Bright-Light Inspection
- Stocker
- Wafer Thickness Measurement
- Macro Inspection
- Slip Finder
- …
file_downloadnadatech-t-series.pdf
file_downloadnadatechoptions-inspection.pdf
file_downloadnadatechbare-wafer-stocker.pdf
file_downloadnadatechoptions-inspection.pdf
file_downloadnadatechbare-wafer-stocker.pdf
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NADAtech T Series OC Bridge Wafer Sorters are engineered to support critical processes in semiconductor manufacturing, including:
- Sorting
Accurate identification and classification of wafers based on OCR data. - Inspection
Inline optical inspection and metrology for real-time quality control. - Handling
Reliable and gentle wafer transport between process steps and tools. - Automation
Seamless integration into fully automated fab environments to maximize efficiency and throughput.