By NADAtech
Supplier Info
Product Type:
Metrology & Handling
Application:
Wafer Handling
Product Description:
The N Series OC Wafer Sorters (also known as Open Cassette or Open Carrier Sorters) are perfect for 50 mm through 200 mm wafer sizes with a small footprint and fast speeds. All models include industry standard robotic components for longest term reliability and support-ability, NADAtech’s innovative RBuilder recipe development tool, and SUREscan thrubeam carrier scanning for perfect wafer mapping. Each system can be tailored to your specific needs by adding preferred Sorter+ options.
- 2 thru 6 open carrier stations are available for better queuing and larger splits
- Highly flexible DPSA >300wph OCR workflow / 800wph transfer only
- Dual paddle buffering for same carrier sorting
- Concurrent wafer size operation (3 sizes per station – max)
- Vacuum backside, passive or active edge handling
- Multiple system workflows with innovative RBuilder recipe development tool
- IOSS OCR
- Smallest 4 station single level footprint available in industry, with smaller 2 station footprint available for tight fab spacing
- Full SECS/GEM E5/E30 driven host communication/operation available
- Optional environmental enclosures – class 10 FFU performance
- Almost all Sorter+ Options can be added on this tool
- Experienced on-site consultation for specific requirements free of charge
Optional Features:
- ChipChecker™ (>350um)
- ChipCheckerPro™ (>40um)
- Bright-Light Inspection
- Stocker
- Wafer Thickness Measurement
- Macro Inspection
- Slip Finder
- …
file_downloadnadatech-n-series.pdf
file_downloadnadatechoptions-inspection.pdf
file_downloadnadatechbare-wafer-stocker.pdf
file_downloadnadatechoptions-inspection.pdf
file_downloadnadatechbare-wafer-stocker.pdf
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NADAtech N Series OC Wafer Sorters are engineered to support critical processes in semiconductor manufacturing, including:
- Sorting
Accurate identification and classification of wafers based on OCR data. - Inspection
Inline optical inspection and metrology for real-time quality control. - Handling
Reliable and gentle wafer transport between process steps and tools. - Automation
Seamless integration into fully automated fab environments to maximize efficiency and throughput.