By R2D (Italy and UK only)
Supplier Info
Product Type:
Equipment
Application:
Wafer Handling
Product Description:
The GEMINI is a semi-automatic batch wafer transfer system with an integrated notch/flat aligner. With its very small footprint, this tool can load and unload from cassette to cassette, a batch of wafers 6″ or 8″, thin or thick, of any substrate material in less than 30 seconds.
The GEMINI is customized to meet your different cassette and wafer specifications needs.
Benefit
- Very small footprint
- Batch wafer transfer system
- Cassette to cassette transfer
- Open Frame, designed for a vertical laminar flow
- ESD : Electrostatic dissipation
- Customized according to customer cassettes and wafers
Options
- Notch or Flat aligner
- Automatic BCR and RFID
- SECS / GEM Communication (integrated Touch screen)
- Selectable Notch / Flat position button
Software
- Friendly and intuitive
- Adjustable parameters
- Historical data recorded
CE CERTIFICATION
SEMI STANDARD
CLASS 1
Performance
UPTIME: 99.8%
MTBF: > 4000 HOURS
MTTR: < 1 HOUR
MTBA: 750 HOURS
CYCLE TIME: < 1MN
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